FIELD: physics.
SUBSTANCE: X-ray fluorescence spectrometre has an X-ray source for irradiating the said sample with primary X-rays under a predefined angle of incidence, a detector for measuring intensity of fluorescent X-rays emitted from the said sample under a predefined detection angle. The said X-ray source and detector are placed such that each intensity value of the fluorescent X-rays is measured using two combinations of the angle of incidence and detection angle in which the angle of incidence and/or detection are different from each other. The angle of incidence and detection angle in each of the combinations are given such that, as applied to measuring depth which is expressed by the mass of coating for which intensity of fluorescent X-rays assumes a value equal to 99% of the maximum intensity, where increase in mass of the coating intrinsic to the target coating to undergo measurement, corresponding measuring depths expressed by the mass of the coating in both combinations have a value greater than the mass of the coating intrinsic to the coating.
EFFECT: more accurate determination of mass and composition of a coating.
3 cl, 3 dwg, 4 tbl
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Authors
Dates
2010-05-27—Published
2006-09-13—Filed