FIELD: physics.
SUBSTANCE: micromechanical gyroscope has an internal and an external frame and two pairs of mutually perpendicular crossed torsion bars with cross-section is in form of an X-shaped profile. One pair of torsion bars joins the external frame to the internal frame and the other pair joins the internal frame to a base which is connected to an electric board which is a dielectric plate with two or more electrode pairs symmetrically placed about the torsion bars under the internal and external frames. The base, frames and torsion bars are made from one plate of monocrystalline silicon.
EFFECT: invention increases measurement accuracy and widens the operating temperature range of the device.
3 dwg
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