MICROMECHANICAL ACCELEROMETER Russian patent published in 2005 - IPC

FIELD: measuring engineering.

SUBSTANCE: accelerometer comprises housing, sensor made of monocrystalline silicon in the form of conducting inertia mass made of a pendulum having two arms and suspended with the use of cross-shaped torsion bars with X-shaped cross-section, and printed circuit board made of a dielectric plate with two pairs of electrodes arranged symmetrically with respect to the axis of the suspension of the electrodes of the capacitive system for measuring displacements and electrodes of the pickup for measuring electrostatic momentum, respectively. The symmetry axis of the inertia mass is in coincidence with the axis that passes through the torsion bars of the suspension. The pendulum suspension is made by removing a part of one arm of the inertia mass on the outer surface of the arm of the inertia mass with respect to the printed circuit board. The surface is provided with T-shaped stiffeners. The sloping sides of the cross-shaped torsions are oriented in the direction of the crystallographic grid of the monocrystalline silicon.

EFFECT: enhanced precision and sensitivity of the accelerometer.

3 dwg