TWO-DIMENSIONAL PIEZOELECTRIC DEFLECTOR Russian patent published in 2010 - IPC G02B26/10 

FIELD: physics.

SUBSTANCE: deflector has a mirror 1 mounted on a mounting 2 which is placed in a housing 3 on a support with an adjustment screw 4 through a spherical joint 5, bimorph piezoelectric actuators 6 which are placed crosswise and symmetrically about the spherical joint 5, where pushers 9, which are attached to the said actuators, are joined to the mounting through spheres 11. The mounting is made in form of a cup with a flange whose flat ring surface faces the rear side of the mirror and is in contact with the spheres.

EFFECT: higher accuracy and stability of the process controlling turning of the mirror in two coordinates.

4 cl, 3 dwg