FIELD: metallurgy.
SUBSTANCE: in vacuum chamber of reactor for evaporation and pyrolysis containing one or more polymers there arranged is reactor for controlled evaporation of metal, which contains one or more metals, and substrate. There performed is simultaneous heating of reactor for evaporation and pyrolysis for decomposition of polymer to precursor gas and reactor for controlled metal evaporation. Supersonic or subsonic jet is formed when precursor gas passes through reactor nozzle for evaporation and pyrolysis. Then leaking of formed jet is performed to heated wire net installed on reactor nozzle for evaporation and pyrolysis, and formed jet is supplied to substrate. Polymerisation is performed on substrate so that polymer material is formed. Carrying gas is simultaneously supplied to heated reactor for controlled evaporation of metal. Then carrying gas jet together with vapours of one or more metals and/or their oxides is supplied to substrate and vapours of one or more metals and/or their oxides are mixed so that polymer is formed on rotating substrate and metal polymeric material is formed. Process is performed at vacuum chamber pressure of 10-2 -10-1 torr.
EFFECT: metal polymeric materials are obtained with new unique properties; at that, the design is simplified and cost of plant for obtaining metal polymeric coatings is decreased.
5 dwg, 1 ex
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Authors
Dates
2010-11-10—Published
2009-01-19—Filed