FIELD: electronics; optics.
SUBSTANCE: device for applying diamond coatings contains a vacuum chamber in which a discharge chamber 14 and a deposition chamber 5 are located, communicating with each other through a conical nozzle 4, the top of which is directed into the discharge chamber 14, separated by a sealed dielectric insert 10 made of quartz of the atmospheric part, where the source of microwave radiation - magnetron - is located. A water-cooled substrate 6 is installed on a substrate holder coated with molten metal - Rose alloy. Means for supplying hydrogen 1 is made with the possibility of its supply directly to the discharge chamber 14. The means for supplying carbon-containing gas is made in the form of a separate channel 2 at the inlet to the conical nozzle 4.
EFFECT: invention provides a high rate and high quality of diamond coating deposition.
1 cl, 2 dwg
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