METHOD FOR DEPOSITION OF NANOGRANULAR COATINGS FROM GAS PHASE Russian patent published in 2024 - IPC C23C16/22 C23C16/448 C23C14/14 C23C14/24 

FIELD: nanogranular coatings.

SUBSTANCE: invention is related to a method for producing nanogranular coating from the gas phase. A powder mixture of a metal-grained precursor, which is a volatile compound of a metal with an organic ligand and nanoparticles is placed in a dispenser hopper at room temperature. Then, with a flow of an inert carrier gas, the specified powder is transported at atmospheric pressure into a vortex sublimator having a heating temperature that ensures the transition of the specified organometallic precursor into the gas phase, including from the surface of the nanoparticles. Then the nanoparticles are transported in a laminar flow of an inert carrier gas and organometallic precursor vapor to the substrate. Then, on the surface of the substrate, the specified stream is mixed with a reactant gas to form a nanogranular coating on the surface of the substrate by physical vapor deposition (PVD) and chemical vapor deposition (CVD).

EFFECT: ensures production of nanogranular coatings that are homogeneous in composition.

5 cl, 5 dwg, 1 ex