METHOD FOR APPLYING AN ANTI-EMISSION COATING OF PYROLYTIC CARBON TO GRID ELECTRODES OF POWERFUL ELECTRIC VACUUM DEVICES Russian patent published in 2021 - IPC C23C14/06 C23C14/24 C23C14/54 H01J19/38 

FIELD: anti-emission coating applying technologies.

SUBSTANCE: invention relates to a technology for applying an anti-emission coating of pyrolytic carbon to metal grid electrodes of high-power electronic lamps, such as powerful oscillator lamps, traveling wave lamps (TWL), pulsed and continuous klystrons, magnetrons. The method is carried out by chemical deposition from the gas phase in a low-temperature plasma of a vacuum-arc discharge from a graphite cathode 2 to grid electrodes 8 heated to a temperature of 550 to 1300°С, while maintaining their operating temperature during coating is controlled by the magnitude of the vacuum-arc discharge current and the location of the grid electrodes 8, carried out by the planetary rotation mechanism 9, in the plasma flow, depending on the distance to the cathode of the vacuum-arc evaporator and the angle of the grid electrode in the vacuum chamber with respect to the plane of the cathode end; or by the current of electrons extracted from the plasma of the vacuum arc discharge, when the grid electrodes 8 are connected to the plus of the vacuum arc discharge power source; or by applying a negative bias voltage to the grid electrodes 8 in the voltage range from -300 V to -1500 V. Plasma is simultaneously used both to heat the grid electrodes and to decompose gaseous hydrocarbons or liquid hydrocarbon vapors into active radicals. This eliminates the need to use plasma-forming gases and decreases the temperature of hydrocarbon pyrolysis.

EFFECT: invention helps to simplify the technological process of applying pyrocarbon, reduce energy consumption and, as a result, increase the economic efficiency of the process, increase the adhesion of coatings and the rate of their deposition.

1 cl, 2 dwg