METHOD FOR CONTROLLING BATCH MANUFACTURING PROCESS OF RESISTIVE COMPONENTS OF INTEGRATED CIRCUITS Russian patent published in 2010 - IPC H01L21/66 

FIELD: electricity.

SUBSTANCE: in a method for controlling batch manufacturing processes of resistive components of integrated circuits, the process correction of design operational variables of the resistive components is paced with considering contact resistance deviation in an interface of a resistive layer and contact pads of the resistive components by a value correlative to a production error of electric resistances of film resistors of test structures, therefore the latter are made of two pairs of the film resistors, and each pair contains the coupled film resistors of equal width and different length connected on the ends with the contact pads of width equal to that of the pair of the film resistors of a test structure.

EFFECT: more effective control of batch manufacturing processes of the resistive components of the integrated circuits.

4 cl, 3 dwg