FIELD: non-destructive testing.
SUBSTANCE: invention relates to non-destructive quality control methods of components of electronic equipment and can be used for rejection of thin-film resistors. Method of rejecting potentially unreliable thin-film resistors involves exposure to high-frequency oxygen plasma at specific energy of 20 to 50 mWt/cm3 for 10 to 20 minutes. Potentially unreliable resistors are identified from the difference in layer resistances of the layer before and after treatment.
EFFECT: reduced labor input with possibility of detection of potentially unreliable resistors at early stage of their formation.
1 cl, 1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| CHIP RESISTOR MANUFACTURING METHOD | 2014 |
|
RU2551905C1 |
| CHIP RESISTOR MANUFACTURING METHOD | 2014 |
|
RU2552630C1 |
| METHOD AND DEVICE FOR REGULATING AND ADJUSTING THIN-FILM RESISTORS | 2006 |
|
RU2306625C1 |
| METHOD FOR STABILISATION OF ELASTIC ELEMENT IN PRESSURE SENSOR WITH PRESSURISED RESISTIVE-STRAIN GAGES | 2009 |
|
RU2399894C1 |
| METHOD OF STABILIZATION OF RESILIENT ELEMENT OF PRESSURE TRANSDUCER PROVIDED WITH RESISTANCE-STRAIN GAUGES | 2005 |
|
RU2301977C1 |
| METHOD OF MANUFACTURING A THIN FILM RESISTOR | 2018 |
|
RU2700592C1 |
| STABILIZATION METHOD OF RESISTORS | 2019 |
|
RU2722213C1 |
| METHOD OF MAKING THIN-FILM PRECISION RESISTOR | 2022 |
|
RU2818204C1 |
| METHOD OF STABILIZATION OF ELASTIC ELEMENT OF PRESSURE SENSOR WITH TENSORESISTORS | 2014 |
|
RU2566538C1 |
| METHOD FOR PRODUCING THIN FILM RESISTOR | 2015 |
|
RU2583952C1 |
