FIELD: physics.
SUBSTANCE: apparatus employs two cylindrical electrodes for supplying radio-frequency power, combined with socket pieces for inlet and outlet of a mixture of working gas and the substance and joined by a ceramic pipe. An extra socket piece with an earthed electrode is connected to the centre of the pipe and is used for output of radiation.
EFFECT: simple design, high reliability and sensitivity.
3 dwg
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Authors
Dates
2011-01-10—Published
2009-03-19—Filed