METHOD OF THERMAL TREATMENT OF SINGLE-CRYSTAL SUBSTRATE ZnTe AND SINGLE-CRYSTAL SUBSTRATE ZnTe Russian patent published in 2011 - IPC C30B29/48 C30B33/02 H01L21/324 H01L21/477 

Abstract RU 2411311 C2

FIELD: electricity.

SUBSTANCE: method includes the first stage of increasing temperature of single-crystal substrate ZnTe up to the first temperature of thermal treatment T1 and maintenance of substrate temperature within specified time; and the second stage of gradual reduction of substrate temperature from the first temperature of thermal treatment T1 down to the second temperature of thermal treatment T2, lower than T1 with specified speed, in which T1 is established in the range of 700°C≤T1≤1250°C, T2 - in the range of T2≤T1-50, and the first and second stages are carried out in atmosphere of Zn, at the pressure of at least 1 kPa or more, at least 20 cycles or at least 108 hours.

EFFECT: invention makes it possible efficiently to eliminate part of Te deposits without considerable deterioration of efficiency and improvement of light transmission of single-crystal substrate ZnTe.

5 cl, 3 dwg

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RU 2 411 311 C2

Authors

Asakhi Tosiaki

Sato Kendzi

Simizu Takajuki

Dates

2011-02-10Published

2006-07-18Filed