METHOD TO PRODUCE SINGLE-CRYSTAL FILMS AND LAYERS OF TELLURIUM Russian patent published in 2012 - IPC H01L21/203 

Abstract RU 2440640 C1

FIELD: power engineering.

SUBSTANCE: films and layers of tellurium with single-crystal structure are produced on crystal faces by means of tellurium conversion into a monatomic steam and growth of single-structure specimens from it, at the same time the process of deposition is carried out in atmosphere of hydrogen at PH2=1.8 atm, temperature of initial tellurium T2=600°C and temperature of substrate zone T1=400°C.

EFFECT: production of films and layers of tellurium of single-crystal structure at orienting substrates.

4 dwg

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RU 2 440 640 C1

Authors

Rabadanov Rabadan Abdulkadyrovich

Ismailov Abubakar Magomedovich

Shapiev Ibragim Magomedovich

Dates

2012-01-20Published

2010-11-10Filed