FIELD: physics.
SUBSTANCE: method of making contact sensor in form of a laminated film involves making at least two layers, one from flexible dielectric material which is a thermoset polymer, laminated on two sides with a thermoplastic polymer on which a second layer is formed from current-conducting element. The method involves subsequent assembly of the element of the sensor to obtain a packet of alternating dielectric and current-conducting layers, connecting elements in the packet under thermocompression welding conditions with preliminary placement of the packet between two dielectric layers made from thermoset polymer, used as walls of the housing, laminated with the thermoplastic polymer only on the side adjacent to the packet. Two flexible members are used to squeeze the assembly and the outline of the sensor, which corresponds to the configuration of the measured object, is then formed. To make the element, a workpiece of the element of the sensor is made first via thermocompression welding with flexible dielectric material inserted in between. A drawing of the element of the sensor is then formed on the workpiece through double-side photochemical etching of metal sheets using a photomask set.
EFFECT: possibility of making film-type sensors with required characteristics, high reliability of the sensor and simple process of making said sensor.
6 cl, 2 dwg
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Authors
Dates
2011-02-10—Published
2009-06-22—Filed