METHOD OF MAKING MULTILAYER FILM CONTACT SENSOR Russian patent published in 2016 - IPC G01L7/08 

FIELD: manufacturing technology.

SUBSTANCE: proposed method relates to production of multilayered film contact threshold pressure sensors and can be used in making multilayer contact threshold pressure sensors fixed on the surface of measured objects. Method of making multilayer film contact sensor involves making of at least two layers, one of which is made from flexible dielectric material sensitive to pressure, on which a second layer made of current-conducting element is formed by photochemical etching with the use of photomasks, subsequent assembly of sensor element obtain a package from alternating dielectric and conductive layers, connecting elements in the package under conditions of thermocompression welding. Assembly is compressed by means of two auxiliary flexible elements, which after pressure release are removed and a sensor circuit is formed. One of the auxiliary elastic elements is used in the form of metal mesh laid on both sides with film from thermosetting polymer. Besides, on the side opposite to the package, before film from thermosetting polymer the film from thermoplastic polymer is placed. For isolation of contacts on the current-conducting layers of different sensor levels thermoplastic polymer is used which is laid between thermosetting films laminated with thermoplastic polymer before thermocompression welding and removed before final formation of the sensor contour.

EFFECT: proposed method consists in avoiding effects such as twisting, warpage and displacement of the conductive pattern on different layers of the sensor relative to each other.

8 cl, 1 dwg