METHOD OF MEASURING THICKNESS AND REFRACTIVITY INDEX OF THIN TRANSPARENT SUBSTRATE COATS Russian patent published in 2011 - IPC G01B11/06 

Abstract RU 2415378 C2

FIELD: physics.

SUBSTANCE: proposed method comprises irradiating controlled coat by optical radiation. Note here that wavelength of radiation falling onto controlled surface is readjusted in narrow spectral range. Then, radiation flows reflected from the coat are registered, dependence of reflected radiation flow upon wavelength is revealed to determine therefrom the dependence of reflectivity factor upon wavelength and first derivative of reflectivity factor of three-layer system "air-coat-substrate" to determine thickness and reflectivity index of the coat therefrom.

EFFECT: faster determination.

3 dwg

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RU 2 415 378 C2

Authors

Belov Mikhail Leonidovich

Gorodnichev Viktor Aleksandrovich

Kozintsev Valentin Ivanovich

Fedotov Jurij Viktorovich

Dates

2011-03-27Published

2008-12-23Filed