METHOD TO BALANCE PIEZOELECTRIC BEAM BIMORPH SENSITIVE ELEMENT OF VIBRATION ANGULAR SPEED SENSOR Russian patent published in 2011 - IPC G01C19/56 G01P9/04 G01P21/00 

FIELD: electricity.

SUBSTANCE: invention relates to small vibration angular speed sensors (ASS), in particular, to production and technology of balancing piezoelectric beam bimorph sensitive element of ASS. Method of balancing consists in the fact that the sensitive element is excited by a self-contained generator on the first harmonic of oscillation mode perpendicular to plane of bimorph beam halves connection, difference of phases and difference of signal amplitudes are measured from measuring electrodes of the sensitive element during its oscillations at the specified mode, and are reduced to the minimum, making slits with a laser beam on the sensitive element at the side of the exciting electrode.

EFFECT: invention makes it possible to increase efficiency and accuracy of balancing, and also to simplify determination and removal of unbalanced mass of bimorph sensitive element of vibration piezoceramic ASS.

3 cl, 11 dwg