SENSOR OPERATING ON SURFACE ACOUSTIC WAVES Russian patent published in 2011 - IPC G01N29/00 

FIELD: physics.

SUBSTANCE: sensor operating on surface acoustic waves (SAW) has substrate made from lithium niobate (LiNbCh), interdigital transducers sputtered on the substrate with a defined spacing, a base and acoustic absorbers of spurious SAW, as well as an acoustic sound guide in form of a polished ingot, wherein the bottom surface of the substrate is processed such that the bottom surface of the substrate under the interdigital transducers is rough, and the bottom surface at the central part between the interdigital transducers is smooth. The base consists of two parts between which the acoustic sound guide is placed under the central part of the substrate, wherein the distance of sputtering combs of the interdigital transducers varies linearly from 0.176 mm to 1.176 mm, and the sputtering spacing depends on the number of combs of the interdigital transducers.

EFFECT: shortening of the time for processing the spectrum of the received vibration to time defined by maximum delay of passage of the SAW through the substrate of the sensor.

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