METHOD OF DETERMINING ELEMENTAL COMPOSITION AND THICKNESS OF SURFACE FILM OF SOLID BODY WITH EXTERNAL ACTION ON SURFACE Russian patent published in 2014 - IPC G01N23/22 

FIELD: physics.

SUBSTANCE: invention can be used to determine elemental composition and thickness of the surface film of a solid body. The method includes measuring energy spectra of ions reflected and knocked from the surface of the solid body, wherein the energy spectra are measured directly in the process of applying external action on the surface of the solid body or immediately after said action by successive irradiation of the surface of the solid body with inert gas ions and hydrogen ions that are mass-separated according to mass-to-charge ratio by applying a corresponding accelerating voltage across an ion source operating on a mixture of inert gases and hydrogen, wherein the elemental composition of the surface layer of the solid body is determined from the energy spectra of reflected inert gas ions and the thickness of the film is determined from the energy spectra of reflected hydrogen ions.

EFFECT: broader functional capabilities of determining elemental composition of a surface film of a solid body.

3 cl, 4 dwg