SENSITIVE ELEMENT OF MICRO SYSTEM ACCELEROMETRE Russian patent published in 2011 - IPC G01P15/08 

FIELD: physics.

SUBSTANCE: sensitive element incorporates silicon monocrystal plate with asymmetric pendulum etched therein. Said pendulum is made up of two plates of equal length and thickness but varying in width. Said plates have one of their sides interconnected. Due to different width on moving plates, mass sensitive to acceleration is produced. Glass plates are soldered to both sides of silicon plate. Conducting electrodes of electrostatic moment converter are evaporated onto first plate. Electrodes of displacement capacitive converter and test electrodes are soldered to second plate.

EFFECT: measurement range expanded to one gram to 100 grams.

2 cl, 2 dwg