FIELD: physics.
SUBSTANCE: microsystem gyroscope has a sensitive element in form of a point mass with a rectangular shape which is suspended by bidirectional elastic suspensions, a power electrostatic transducer which imparts vibratory movements to the point mass, a capacitive displacement transducer which detects movements of the mass under the action of Coriolis forces. The gyroscope also includes an adjustment device and a noise suppressor.
EFFECT: high sensitivity to measurement of angular velocity and full noise-immunity from cross coupling and can be realised on any range of measurements of angular velocity.
3 dwg
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Authors
Dates
2012-11-10—Published
2011-06-20—Filed