MICROACCELEROMETER Russian patent published in 2013 - IPC G01P15/08 

FIELD: instrument making.

SUBSTANCE: microsystem accelerometer comprises silicon carcass frame with silicon conducting pendulum made by anisotropic etching an connected by elastic suspensions with said carcass frame. Pendulum dissymmetry is ensured by shifting balance pivot relative to axis that passes through the plate center. Pendulum balance pivot divides the plate in two unequal parts. Accelerometer comprises also the negative stiffness device composed by two resistors and voltage source to set accurately the preset passband. For acceleration measurement range of 0 to 500 g said preset passband may be set to 5-100 Hz which is required for navigation accelerometers.

EFFECT: higher accuracy.

2 cl, 3 dwg