TUNING FORK MICROGYROSCOPE Russian patent published in 2016 - IPC G01C19/56 

FIELD: physics.

SUBSTANCE: invention relates to microsystem tuning fork gyroscopes. Disclosed tuning fork microgyrosope comprises structural monosilicic plate and two sensitive mass, each of which is suspended by means of flexible braces on consoles which, in their turn, are rigidly fixed on a central beam. On fixed plates of microgyroscope there are conductive electrodes. Surface of said conductive electrodes and surface of sensitive mass are made porous. Pores are filled with conducting material, density of which is higher than that of porous material.

EFFECT: technical result is high sensitivity of micromechanical gyroscope.

1 cl, 4 dwg