INTEGRAL ACCELEROMETER SENSITIVE ELEMENT Russian patent published in 2005 - IPC

Abstract RU 2246734 C1

FIELD: measurement technology.

SUBSTANCE: sensitive element is made of conductive monocrystalline silicon and has pendulum connected with frame edge by means of flexible suspensions. Frame is connected with carrier frame by means of cantilever beam. Carrier frame is rigidly connected to base of accelerometer by means of fitting platforms. Contact tensions in frame affecting precision of the device are reduced due to introduction of carrier frame, which is rigidly connected with base.

EFFECT: improved precision of measurement.

1 dwg

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RU 2 246 734 C1

Authors

Bylinkin S.F.

Vavilov V.D.

Mironov S.G.

Dates

2005-02-20Published

2003-07-18Filed