PRODUCING SILICON USING FLUIDISED-BED REACTOR BUILT INTO SIEMENS PROCESS Russian patent published in 2011 - IPC C01B33/00 C01B33/03 C01B33/35

Abstract RU 2428377 C2

FIELD: chemistry.

SUBSTANCE: invention can be used in production of polycrystalline silicon used in microelectronics. During production thereof, a stream of exhaust gas from one or more Siemens is fed into one or more fluidised-bed reactors. The stream of exhaust gas from multiple Siemens reactors can be fed directly into one or more fluidised-bed reactors without intermediate processing steps. The stream of exhaust gas contains trichloromethane, silicon tetrachloride, hydrogen, hydrogen chloride and silicon powder. The silicon powder can be removed from the stream of exhaust gas before feeding into the fluidised-bed reactor.

EFFECT: invention makes heating easy when producing polycrystalline silicon and reduces the amount of by-products.

14 cl, 2 dwg

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RU 2 428 377 C2

Authors

Arvidson Arvid Nil

Molnar Majkl

Dates

2011-09-10—Published

2007-06-14—Filed