FIELD: process engineering.
SUBSTANCE: invention relates to method of silicon production. Proposed method comprises feed of etching gas nearby the walls of fluidised bed reactor. Etching gas consists of, in fact, tetrachlorosilane. Siemens reactor can be incorporated with this process so that its exhaust gases are used as initial gas and/or etching gas to be fed to fluidised bed reactor.
EFFECT: ruled out silicon sedimentation at fluidised bed reactor walls.
20 cl, 3 dwg
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Authors
Dates
2014-06-10—Published
2009-10-12—Filed