FIELD: chemistry.
SUBSTANCE: disclosed is a method of cracking polychlorosilane and/or polychlorosiloxane, which comprises steps a) obtaining a mixture containing polychlorosilane and/or polychlorosiloxane; b) removing solid particles from said mixture to obtain a pure mixture; and c) recirculating the obtained pure mixture into a distillation apparatus, and cracking the polychlorosilane and/or polychlorosiloxane in the distillation apparatus to obtain trichlorosilane, tetrachlorosilane or a combination thereof.
EFFECT: reducing wastes and increasing output of chlorosilane monomers when producing trichlorosilane.
13 cl, 1 dwg
