FIELD: metallurgy.
SUBSTANCE: according to procedure substrate is placed in vacuum chamber further vacuumised. Surface of the substrate is treated with accelerated ions and there is applied a layer of material ensuring adhesion of successive layers. Super hard carbon coating is formed by means of pulse flow of carbon plasma from multitude of cathode spots with coefficient of ablation of graphite cathode within the range from 70 to 140 mkg/Cl. Temperature of the substrate is maintained within the range from 200 to 450 K by regulation of pulse repetition frequency of electric-arc discharge. Also, the said value of ablation coefficient is facilitated with a value of discharge of a capacitive storage. A value of ablation coefficient, if necessary, is changed in the process of carbon coating application within the range from 70 to 140 mkg/Cl.
EFFECT: increased density, micro-hardness, electric resistance and heat resistance of coating, its reduced absorption in optical range.
3 cl, 3 ex
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Authors
Dates
2011-10-10—Published
2009-08-10—Filed