PROCEDURE FOR FORMING SUPER HARD AMORPHOUS CARBON COATING IN VACUUM Russian patent published in 2011 - IPC C23C14/06 C23C14/32 C23C14/02 

Abstract RU 2430986 C2

FIELD: metallurgy.

SUBSTANCE: according to procedure substrate is placed in vacuum chamber further vacuumised. Surface of the substrate is treated with accelerated ions and there is applied a layer of material ensuring adhesion of successive layers. Super hard carbon coating is formed by means of pulse flow of carbon plasma from multitude of cathode spots with coefficient of ablation of graphite cathode within the range from 70 to 140 mkg/Cl. Temperature of the substrate is maintained within the range from 200 to 450 K by regulation of pulse repetition frequency of electric-arc discharge. Also, the said value of ablation coefficient is facilitated with a value of discharge of a capacitive storage. A value of ablation coefficient, if necessary, is changed in the process of carbon coating application within the range from 70 to 140 mkg/Cl.

EFFECT: increased density, micro-hardness, electric resistance and heat resistance of coating, its reduced absorption in optical range.

3 cl, 3 ex

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RU 2 430 986 C2

Authors

Moskvitin Aleksandr Aleksandrovich

Maslov Anatolij Ivanovich

Kolpakov Aleksandr Jakovlevich

Poplavskij Aleksandr Iosifovich

Dates

2011-10-10Published

2009-08-10Filed