METHOD OF OBTAINING WEAR-RESISTING ULTRA-HARD COATINGS Russian patent published in 2009 - IPC C23C14/24 C23C14/06 B32B15/04 B82B3/00 

FIELD: production processes.

SUBSTANCE: invention refers to obtaining of wear-resisting ultra-hard coatings, namely, to forming of diamond-type coatings and can be used in metalworking, engineering industry, nanotechnologies, medicine and electronics. Preliminary there performed is product surface plasma stripping by accelerated ions in vacuum chamber at pressure of 10^-3 - 10 Pa. Then adhesion layer is applied by plasma method. The thickness is 1-500 nm. The layer is made from metal that belongs to the group of aluminium, chrome, zirconium, titanium, germanium or silicone or their alloys. At the same time the product receives direct or pulse negative voltage of 1-1500 V. Then there applied is intermediate layer with thickness of 1-500 nm. It consists of carbon and metal mixture. Metal belongs to the group of aluminium, chrome, zirconium, titanium, germanium or silicone or their alloys. Intermediate layer is applied at ascending changing of carbon concentration in this mixture from 5 to 95 at.%. At the same time the product receives direct or pulse negative voltage of 1-1500 V. Then there applied is at least one layer of carbon diamond-type film by graphite cathode or laser spraying or by plasma destruction of carbon-bearing gases or carbon-bearing liquid vapours.

EFFECT: increase of adhesion, wear resistance and temperature stability of diamond-type coating.

11 cl, 1 dwg, 5 ex