METHOD OF PRODUCTION OF THE SUPERHARD COATINGS Russian patent published in 2007 - IPC C23C14/16 C23C14/24 B32B7/02 B32B15/04 

FIELD: metallurgy industry; methods of production of the superhard coatings.

SUBSTANCE: the invention is pertaining to production of the superhard coatings. The product surface is pretreated in the vacuum chamber with the accelerated ions of argon with the energy up to 1000 eV and at the gas pressure of argon (2-6)·10² Pa. Then on the treated surface apply the underlayer on the basis of the metal selected from the group: titanium, chromium and zirconium. The underlayer is applied by means of the electric arc evaporator with separation of the plasma torrent by the magnetic field. Then apply the composite layer (metal-carbon) by the same method, as the previous layer. The diamond-like film is applied by means of the carbonic plasma generator at the pulse current of 3-5 kA at the discharge duration of 0.2-0.5 msec and the pause duration of no less than 10 msec. The diamond-like film is applied by the electric arc vacuum spraying of the graphitic cathode from the cathode spot generating the carbonic plasma at the pulse current of 3-5 кА, at the discharge duration of 0.2-0.5 msec and the pause duration of no less than 10 msec. Then form the protective underlayer of the matched atomic-molecular flows of carbon and the element from the group containing aluminum, titanium, silicon and zirconium, with the change of the mass % share from 0 up to 8; then apply the metallic layer. The technical result of the invention is development of the technology -of production of the superhard carbon-metal coating with the preset properties. At that the lower layer should have the high adhesion with the substrate material, the medium layer should have the high hardness, the increased -wear-resistance and the upper layer should have the good thermal conductivity and thermal stability.

EFFECT: the invention ensures development of the technology -of production of the superhard carbon-metal coating with the preset properties, its lower layer should have the high adhesion with the substrate material, the medium layer should have the high hardness, the increased -wear-resistance and the upper layer should have the good thermal conductivity and thermal stability.

6 cl, 1 ex