FIELD: physics.
SUBSTANCE: defect imitator-sample is placed on the inspected area of an article on the side of a radiation source, said defect imitator-sample having a reference defect whose size corresponds to the real defect detected on the image, the depth of which is to be determined. Double exposure is then carried out without changing the direction of radiation at different distances from the radiation source to the inspected article, after which dimensions of images of the reference and real defects are measured on both images and the depth of the real defect is determined by calculation or graphically based on measurement results and the known exposed thickness of the article.
EFFECT: high reliability and accuracy of determining depth of a defect.
1 dwg
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Authors
Dates
2011-12-20—Published
2010-06-02—Filed