FIELD: physics.
SUBSTANCE: method includes surface illumination with laser radiation characterising by that laser radiation is focused forming reference and objective beams at the angle to each other used to scan measured surface. Beam image is registered as luminous points on digital screen. At each scanning step spacing between points and digital screen image video sequence are fixed. Relief depth h is determined on each scanning step at following ratio: 
where B1 is distance between luminous points on digital screen formed by laser beams on initial scanning step, Bx is distance between luminous points on digital screen formed by laser radiation on following scanning steps.
EFFECT: increase of method resolution and performance.
4 dwg
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