FIELD: physics.
SUBSTANCE: invention can be used when making gas sensors, based on composite semiconductor inorganic materials, as well as during synthesis of equivalent circuit film structures. In the gas-sensitive element, active and capacitive resistance is measured depending on frequency, from which the magnitude and angle of impedance of the equivalent circuit model of the gas-sensitive element are determined; the transfer-function coefficient of the gas-sensitive element is then determined and the electric circuit of the model of the gas-sensitive element is synthesised with determination of values of resistance and capacitance of elements of the circuit model of the analysed gas-sensitive element.
EFFECT: measurements are taken in a wide frequency range, which enables to select that region where values corresponding to the true volume resistance of the sample are measured.
1 dwg
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Authors
Dates
2012-01-10—Published
2010-07-09—Filed