THE TRANSISTOR ON THE BASIS OF THE SEMICONDUCTING COMPOUND Russian patent published in 2012 - IPC H01L29/72 

Abstract RU 2442243 C1

FIELD: microelectronics.

SUBSTANCE: invention relates to the microelectronic technologies; the essence of the invention is as follows: the transistor on the basis of the semiconducting compound made of the semiconducting wafer with the channel layer and contact layer includes the gate, ohmic contacts of the source and drain as well as air-lifts; the ohmic contact is made on the basis thin-film composition of Ge and Сu located on the surface of the semiconducting wafer with a general thickness of 50 - 500 nm and weight content of Ge in the composition counting to 20-45%.

EFFECT: reduction of the production cost of transistors manufactured on the basis of semiconducting compounds due to adoption of metal coating not containing precious metals.

9 cl, 4 dwg

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RU 2 442 243 C1

Authors

Anishchenko Ekaterina Valentinovna

Arykov Vadim Stanislavovich

Erofeev Evgenij Viktorovich

Ishutkin Sergej Vladimirovich

Kagadej Valerij Alekseevich

Nosaeva Ksenija Sergeevna

Dates

2012-02-10Published

2010-10-28Filed