PULSE-PERIODIC ELECTRIC-DISCHARGE EXCIMER LASER Russian patent published in 2013 - IPC H01S3/03 H01S3/97 

Abstract RU 2477912 C2

FIELD: physics.

SUBSTANCE: laser has an elongated housing in which there is a gas flow generating system, a UV pre-ioniser, elongated ground electrode and high-voltage electrode. The laser housing is in form of a metal pipe with the ground electrode mounted on its inner surface, and a dielectric pipe inside said metal pipe, on the outer surface of which the UV pre-ioniser is and the partially transparent high-voltage electrode are mounted. Capacitors and components of the discharge feed circuit, for example a magnetic coupling, can be placed inside the dielectric pipe.

EFFECT: high generation energy and average power of laser radiation with high reliability of operation of the laser.

2 cl, 1 dwg

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RU 2 477 912 C2

Authors

Borisov Vladimir Mikhajlovich

Dates

2013-03-20Published

2011-05-20Filed