THIN-FILM HEAT SENSOR HAVING WAVEGUIDE INPUT FOR MEASURING POWER OF PULSED MICROWAVE RADIATION Russian patent published in 2012 - IPC G01R21/12 

FIELD: physics.

SUBSTANCE: adsorbing thin layer of dielectric is deposited on a dielectric wedge with thickness d₁, having high thermal conductivity χ₁, which is placed inside a waveguide. N heat-sensitive thin-film resistors with surface area S=a*b<τ*χ₁ (where τ is operating speed of the sensor - the time for reaching steady-state temperature of the thermal element under the effect of rectangular pulsed electromagnetic radiation) are formed on said film. The value of τ can be reduced by selecting the size and number of thin-film resistors. The design of the sensor enables its matching with the waveguide duct.

EFFECT: high accuracy of measuring energy flux and parameters of the form of a microwave radiation pulse with duration shorter than 10 ns.

4 dwg