NANOSTRUCTURAL IR-RECEIVER (BOLOMETER) WITH BIG ABSORPTION SURFACE Russian patent published in 2014 - IPC G01J5/20 H01L31/09 H01L27/14 

Abstract RU 2511275 C2

FIELD: measuring equipment.

SUBSTANCE: invention belongs to area of development of detectors of infra-red radiation and concerns bolometric IR-detector. The detector consists of a membrane with area S with a thermosensitive element (TSE) and an electromagnetic energy absorber (EEA) attached to a substrate by means of current-carrying buses. TSE and EEA are incorporated in one element, which is executed in the form of a cover from a thin-film monocrystal material Bi1-xSbx (0<x<12). The cover to the maximum covers a surface of a membrane and includes a strip, which is separated by gaps with I width from other part of the cover, excluding the ends of the strip connected to the other part of the cover. Besides, the cover is divided by a crack into two parts electrically connected by the specified strip. Parameters of the bolometer meet the following ratios: R/2Z <1, where R - specific superficial resistance of a film, Z=120π Ohm - an impedance of free space; S/χ1>l22, where χ1 - temperature conductivity of medium, which directly contacts with a membrane, χ2 - temperature conductivity of a membrane material.

EFFECT: simplification of design and increased specific detecting ability of the device.

1 dwg

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Authors

Deniskin Viktor Vasil'Evich

Shiljaev Anatolij Alekseevich

Emokhonov Viktor Nikolaevich

Sigov Aleksandr Sergeevich

Shiljaeva Anastasija Anatol'Evna

Fomina Lidija Fedorovna

Ivanov Anatolij Aleksandrovich

Chulkova Anna Vjacheslavovna

Kik Mikhail Andreevich

Dates

2014-04-10Published

2012-07-16Filed