BOLOMETRIC RECEIVER WITH POLYMER HEAT INSULATOR Russian patent published in 2024 - IPC G01J5/20 

FIELD: photometry.

SUBSTANCE: uncooled bolometers based on thin-film thermoresistive sensitive elements isolated from the substrate, and methods for their manufacture. The bolometric receiver contains an elongated thin-film element made of a conductive material, placed on a substrate and separated from it by a heat-insulating layer made of a polymer with cross-linked intermolecular bonds and located directly on the substrate. Thermal conductivity of the polymer is lower than thermal conductivity of the substrate. The bolometer also contains conductive contact elements, partially located on top of the ends of the specified elongated thin-film element made of conductive material and having electrical and thermal contact with it. Production of such a bolometer is carried out using planar technology and includes three stages. At the first stage, the first thin-film element of a polymer with cross-linked intermolecular bonds is formed on the substrate. In the second stage, the second elongated thin-film element of conductive material is formed on top of the first element. In the third stage, contact elements made of conductive material are formed partially over the ends of the second element, with the contact elements being brought into electrical and thermal contact with the ends of the second element.

EFFECT: improved sensitivity of an uncooled bolometric radiation detector and increased mechanical stability.

22 cl, 4 dwg