SPECTRAL-SELECTIVE INFRARED RADIATION ABSORBER AND MICROBOLOMETER DETECTOR BASED ON IT Russian patent published in 2019 - IPC G01J5/20 G02B5/22 

FIELD: optics.

SUBSTANCE: invention relates to the field of optoelectronic instrument making and concerns a spectral-selective IR radiation absorber and a microbolometric detector. Absorbing device includes plane-parallel resonator with front and rear mirrors. Front mirror is made in form of metal film, which serves as absorbing layer. Rear mirror is made of polar dielectric with high, more than 95 %, reflection coefficient in the band of residual beams. Microbolometric detector has a matrix of pixels, each of which includes an IR radiation absorber, a membrane with a heat-sensitive layer having thermal contact with the front mirror of the absorber and a silicon substrate with membrane support structures formed therein and a pixel readout control and reading circuit.

EFFECT: simplified design of absorber, increased spectral selectivity and possibility of spectral adjustment.

10 cl, 6 dwg