THERMAL MICROMECHANICAL ACTUATOR AND METHOD OF MAKING SAID ACTUATOR Russian patent published in 2012 - IPC B81B3/00 B81C1/00 B81B7/00 

FIELD: physics.

SUBSTANCE: invention relates to microsystem engineering and can be used in designing and manufacturing micromechanical devices, having elastic, flexible deformable actuating elements which enable electric signal-to-displacement conversion and/or temperature change-to-displacement conversion for microrobotic systems. The thermal micromechanical actuator comprises a silicon monocrystalline wafer with orientation [100], having a mesostructure consisting of parallel trapezoid inserts joined by polyimide interlayers formed by a polyimide film, a heater and a heater metal coating. According to the invention, the polyimide film is made from a polypyromeltitimide layer adjacent to the parallel trapezoid inserts, which is reinforced with carbon nanotubes with functional carboxylic groups and concentration of not more than 11×10^-3 g/cm³ and a non-reinforced polypyromeltitimide outer layer.

EFFECT: wider temperature range, high technological effectiveness and reliability.

10 cl, 8 dwg