MICROSYSTEM CAPACITIVE SENSOR FOR MEASURING PHYSICAL QUANTITIES Russian patent published in 2015 - IPC B81B7/02 G01D5/24 

FIELD: physics.

SUBSTANCE: microsystem capacitive sensor for measuring physical quantities includes: a base made of dielectric material; one or more actuating elements in the form of movable thermomechanical microactuators placed on the base; wherein metallic capacitor plates are formed over a polyamide layer of the thermomechanical microactuators on opposite lateral faces of silicon grooves filled with a polyamide, said plates being connected in parallel to each other by conductors running along the movable tail of the thermomechanical microactuator to its base; on and/or inside the base there are metal tracks for electrical contact to pads of the movable thermomechanical microactuator, configured to measure capacitance between the plates of the capacitor formed on the movable thermomechanical microactuator.

EFFECT: integrating in one structure sensors of physical quantities, displacement, acceleration, temperature, mechanical force, mass, electrical power, flux, illumination and humidity, enabling operation in deep space conditions and resistance to harsh operating temperature conditions, producing a sensor using batch methods based on standard techniques for microprocessing silicon and mechanical processing of structural components, broader capabilities for unification and production of a standard series of sensors with different measurement ranges of the required physical quantities, enabling sensor tuning through an active operating mode, use as a feedback sensor for systems based on movable thermomechanical microactuators.

4 cl, 1 dwg