FIELD: physics.
SUBSTANCE: micromechanical actuator is designed as a formed elastically-hinged cantilever beam in the mesa structure consisting of the parallel trapezoidal inserts from the mono-crystallic silicon substrate of p-type with orientation [100] disposed perpendicular to the main axis of the cantilever beam and connected with the polyimide layers formed of the polyimide film, a heater and electroconductive busbars forming an ohmic contact with silicon, the trapezoidal inserts are made on the opposite sides of the elastically-hinged cantilever beam and form, at least, two deformation zones.
EFFECT: providing opportunities to increase the operational reliability in a wide temperature range.
11 cl, 5 dwg
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