FIELD: physics.
SUBSTANCE: sensor has a housing and a deflecting element mounted on the housing, wherein the deflecting element reacts to the measured parameter, and the housing and the deflecting element are made from sintered ceramic containing at least one of the following substances: an aluminium oxynitride spinel or a magnesium aluminate spinel.
EFFECT: design of a pressure sensor with small dimensions, efficient in use and cheap to manufacture.
10 cl, 2 dwg
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Authors
Dates
2012-06-10—Published
2007-04-24—Filed