MICRO-ELECTROMECHANICAL PRESSURE SENSOR Russian patent published in 2012 - IPC G01L9/00 

FIELD: physics.

SUBSTANCE: micro-electromechanical pressure sensor is in form of rigidly connected glass base and silicon sensitive element. The glass base is metal-coated and is a fixed electrode. The silicon sensitive element is a base configuration etched into a silicon plate, into which are etched a cavity (working volume) of a thin membrane whose rigidness is determined by the range of the measured pressure values and a channel carrying the conductor. The rigid element at the centre of the membrane is a capacitor plate.

EFFECT: high resolution of the pressure sensor.

2 cl, 2 dwg