FIELD: physics.
SUBSTANCE: pressure sensor has a housing and an elastic measuring membrane. The housing and/or measuring membrane are made from ceramic, glass or monocrystalline material. The measuring membrane has at least one first electrode which faces the surface of the main housing. The surface of the main housing has at least one second electrode which faces the measuring membrane. Capacitance between the first electrode and the second electrode is a measure of pressure to be measured. One of the first and second electrodes has a current conducting layer which contains metal and glass. The metal contains concomitant domains of noble metal elements. The noble metal elements are Au and Pt. The glass is resistance to high vacuum at temperature 910°C. Besides the present impurities, the glass does not contain lead or boron.
EFFECT: high sensitivity of the pressure sensor.
24 cl, 3 dwg
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