METHOD OF PRODUCING SILICON TETRAFLUORIDE AND APPARATUS FOR REALISING SAID METHOD Russian patent published in 2012 - IPC C01B33/107 

FIELD: chemistry.

SUBSTANCE: invention relates to the technique of producing silicon tetrafluoride which is used in production of pure polycrystalline silicon which is suitable, for example, for making solar batteries. The method involves fluorination of quartzite or silicon with gas and subsequent extraction of silicon tetrafluoride from the gaseous mixture formed. The fluorinating gas used is hydrogen fluoride (HF) or carbon tetrafluoride (CF₄). The fluorination process is carried out in low-temperature plasma by placing quartzite or silicon into a container having a metallic micromesh below the active ionisation zone of the fluorine-containing gas.

EFFECT: disclosed engineering solution ensures controllability and reproducibility of the process, increases reliability of the equipment as well as environmental safety.

2 cl, 1 dwg