FIELD: chemistry.
SUBSTANCE: silicon tetrafluoride is extracted from oxygen-containing gas mix obtained by quartz sand burning in elementary fluorine. The mix is cooled in two sequential heat exchangers to the temperature above triple point of silicon tetrafluoride, with preliminary compression to the pressure correlating to fluid state of silicon tetrafluoride at selected cooling temperature. To ensure process safety, all equipment is placed in sealed cases with automatic operation system.
EFFECT: obtaining liquid high-grade silicon tetrafluoride, gradual and complete filling of storage and usage containers by silicon tetrafluoride.
12 cl, 3 dwg, 2 ex
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD AND DEVICE FOR PROCESSING OF SODIUM SILICOFLUORIDE | 2006 |
|
RU2331582C2 |
| METHOD FOR PRODUCTION OF HIGH-PURITY POLYCRYSTALLINE SILICON | 1993 |
|
RU2078034C1 |
| METHOD OF PREPARING HIGH-PURITY SILICON POWDER FROM SILICON PERFLUORIDE WITH SIMULTANEOUS PREPARATION OF ELEMENTARY FLUORINE, METHOD OF SEPARATING SILICON FROM SALT MELT, SILICON POWDER AND ELEMENTARY FLUORINE OBTAINED BY INDICATED METHOD, AND SILICON TETRAFLUORIDE PREPARATION PROCESS | 2004 |
|
RU2272785C1 |
| METHOD OF OBTAINING AGENT SELECTED FROM SERIES OF REFRACTORY METALS OR FROM SERIES OF NONMETALS: BORON, PHOSPHORUS, ARSENIC, SULFUR | 2005 |
|
RU2298588C2 |
| METHOD OF SILICIUM TETRAFLUORIDE PRODUCTION, METHOD OF SEPARATION OF SILICIUM TETRAFLUORIDE FROM OXYGEN AND HIGH-VOLATILE FLUORIDE IMPURITIES, METHOD OF PRODUCTION OF SLICIUM POWDER FROM SILICIUM TETRAFLUORIDE | 2003 |
|
RU2324648C2 |
| METHOD OF PRODUCTION OF AGENT SELECTED FROM SERIES: BORON, PHOSPHORUS, SILICON AND RARE-EARTH METALS (VERSIONS) | 2005 |
|
RU2298589C2 |
| METHOD OF PRODUCING HIGHLY PURE SILICON TETRAFLUORIDE | 2009 |
|
RU2406694C1 |
| METHOD OF SILICON TRIFLUORIDE PRODUCING | 1991 |
|
RU2046095C1 |
| METHOD OF PREPARING MONOSILANE | 1995 |
|
RU2077483C1 |
| HYDROGEN FLUORIDE PRODUCTION PROCESS AND INSTALLATION | 2005 |
|
RU2287480C1 |
