FIELD: physics.
SUBSTANCE: in the disclosed device, use of a discharge chamber made from a dielectric is combined with use of a broadband single-mode microwave transformer of microwave oscillations. A microwave oscillation frequency modulator is used together with a measuring probe, wherein phase matching of electromagnetic oscillations is provided by the possibility of moving the magnetic system rings along the edge of the outer surface of the discharge chamber. The disclosed device is characterised by presence of a solid-state neutral particle source PB.
EFFECT: high stability of parameters and flux density of the plasma, eliminating loss of ions of the working medium and reducing power loss in the discharge chamber, which increases efficiency of the device, high uniformity of plasma flow in the radial direction.
1 dwg
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