NANOCOMPOSITE ANTIREFLECTION COATING IN FORM OF THICK FILM AND METHOD OF MAKING SAID COATING Russian patent published in 2012 - IPC H01L31/18 B82B3/00 

Abstract RU 2456710 C1

FIELD: physics.

SUBSTANCE: nanocomposite antireflection coating in form of a thick film contains a polymethyl methacrylate polymer matrix filled with 1-10 nm silver nanoparticles with mass concentration 3±0.5% and modified viscous polymethyl methacrylate in volume ratio 10:1, respectively. The method of making a nanocomposite coating in form of a thick film involves dissolving a polymethyl methacrylate-based composition containing 1-10 nm silver nanoparticles with mass concentration 3±0.5% until formation of a starting liquid composition with kinematic viscosity from 26.1 ±0.7 to 80±4 cS and polymer concentration of 0.15-0.31 pts.wt, stabilising the obtained starting composition by adding, while stirring, a modifying additive in form of polymethyl methacrylate with kinematic viscosity 84.2±0.5 cS in volume ratio10:1, respectively, which ensures formation of an adsorption-solvate layer on the surface of particles of the starting composition, followed by depositing the obtained process nanocomposite onto a solid underlying surface and drying.

EFFECT: obtaining an antireflection coating of high quality and high efficiency.

4 cl, 5 dwg, 5 tbl

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Authors

Gadomskij Oleg Nikolaevich

Ushakov Nikolaj Mikhajlovich

Podvigalkin Vitalij Jakovlevich

Muzalev Pavel Anatol'Evich

Kul'Batskij Dmitrij Mikhajlovich

Kosobudskij Igor' Donatovich

Dates

2012-07-20Published

2011-01-18Filed