METHOD OF MAKING ACOUSTOOPTICAL MODULATORS Russian patent published in 2012 - IPC H01L41/83 H01L41/22 

FIELD: physics.

SUBSTANCE: acoustic line is made in form of a rectangular prism. Further, optically antireflecting coatings are deposited via vacuum deposition onto the faces of the rectangular prism. A first adhesive layer is then deposited on one of the faces of the rectangular prism by vacuum deposition. Using vacuum deposition, a first gold layer is deposited on said first adhesive layer. Further, a first indium layer is deposited on said first gold layer by vacuum deposition. Also, using vacuum deposition, a second adhesive layer is deposited on one of the larger faces of each of two plates made from lithium niobate of the (Y+36°)-section. Using vacuum deposition, a second gold layer is then deposited on said second adhesive layer. Using vacuum deposition, a second indium layer is deposited on said second gold layer. The acoustic line is the joined with the lithium niobate plates by pressing the lithium niobate plates with the pressure of each lithium niobate plate of the second indium layer to the corresponding first indium layer. Each of the lithium niobate plates is then ground off to the required thickness which corresponds to the operating frequency band. Using vacuum deposition, a third adhesive layer is deposited on each free large face of each lithium niobate plate. A third gold layer is then deposited on said third adhesive layer via vacuum deposition. The method is characterised by that the acoustic line material used is a TeO₂ monocrystal, wherein the faces of the rectangular prism are directed perpendicular to the crystallographic direction [001], , [110], and deposition of optically antireflecting coatings is carried out on faces of the rectangular prism which are perpendicular to the the crystallographic direction ; when joining the lithium niobate plates to the acoustic line, the projections of polar axes of the lithium niobate plates are directed onto the same plates in opposite sides; the first adhesive layer is deposited on one of the faces of the rectangular prism (001); the first, second and third adhesive layers are made from chromium; said pressure lies in the range of 50-100 kg/cm², during at least part of the time when the lithium niobate plates are pressed to acoustic line; voltage of 10-50 V is applied across each lithium niobate plate at antiresonance longitudinal vibrations of the corresponding lithium niobate plate for 1-3 minutes; the resulting workpiece, which is in form of an acoustic line with antireflection coatings, first adhesive layer, first gold layer and first indium layer lying successively on the acoustic line, and successively lying second indium layer, second gold layer, second adhesive layer of one of the lithium niobate plates and the lithium niobate plate itself, as well as the nearby successively lying second indium layer, second gold layer, second adhesive layer of another lithium niobate plate and the lithium niobate plate itself, as well as the third adhesive layer and third gold layer lying on each of said lithium niobate plates, is cut into separate elements in parallel to planes (110) of the TeO₂ monocrystal.

EFFECT: high efficiency of the device while simultaneously increasing efficiency of the manufacturing process.

1 cl, 3 dwg